Microlithography: Science and Technology - Bruce W. Smith-Kazuaki Suzuki - Books - Taylor & Francis Ltd - 9781032836737 - June 24, 2024
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Bruce W. Smith-Kazuaki Suzuki
Microlithography: Science and Technology 3rd edition

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Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.

838 pages, 570 Illustrations, black and white

Media Books     Paperback Book   (Book with soft cover and glued back)
Released June 24, 2024
ISBN13 9781032836737
Publishers Taylor & Francis Ltd
Pages 850
Dimensions 181 × 256 × 46 mm   ·   1.52 kg
Editor Smith, Bruce W.
Editor Suzuki, Kazuaki

Mere med samme udgiver

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