Ion Implantation in Microelectronics: A Comprehensive Bibliography - Computer Science Information Guides - A. H. Agajanian - Books - Springer-Verlag New York Inc. - 9781468461343 - May 18, 2012
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Ion Implantation in Microelectronics: A Comprehensive Bibliography - Computer Science Information Guides Softcover reprint of the original 1st ed. 1981 edition

A. H. Agajanian

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Ion Implantation in Microelectronics: A Comprehensive Bibliography - Computer Science Information Guides Softcover reprint of the original 1st ed. 1981 edition

During the past ten years the use of ion implantation for doping semiconductors has become an active area of research and new device development. The main sources searched were: Physics Abstracts (PA) , Electrical and Electronics Abstracts (EEA) , Chemical Abstracts (CA) , Nuclear Science Abstracts (NSA) , and Engineering Index.


268 pages, black & white illustrations

Media Books     Paperback Book   (Book with soft cover and glued back)
Released May 18, 2012
ISBN13 9781468461343
Publishers Springer-Verlag New York Inc.
Pages 266
Dimensions 178 × 254 × 14 mm   ·   471 g
Language English  

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