CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications - Microtechnology and MEMS - D. Lange - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783540431435 - July 23, 2002
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D. Lange

CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications - Microtechnology and MEMS 2002 edition

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This book is intended for scientists and engineers in the field of micro- and nano electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype.

142 pages, biography

Media Books     Hardcover Book   (Book with hard spine and cover)
Released July 23, 2002
ISBN13 9783540431435
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 142
Dimensions 166 × 243 × 14 mm   ·   340 g
Language English  

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