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Lecture Notes on Principles of Plasma Processing 2003 edition
Francis F. Chen
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Lecture Notes on Principles of Plasma Processing 2003 edition
Francis F. Chen
Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. This title introduces basic plasma concepts to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas.
219 pages, 177 black & white illustrations, biography
| Media | Books Book |
| Released | January 31, 2003 |
| ISBN13 | 9780306474972 |
| Publishers | Springer Science+Business Media |
| Pages | 219 |
| Dimensions | 213 × 278 × 12 mm · 517 g |
| Language | English |
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