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Spectroscopic Ellipsometry and Reflectometry: A User's Guide
Tompkins, Harland G. (Motorola, Inc.)
Spectroscopic Ellipsometry and Reflectometry: A User's Guide
Tompkins, Harland G. (Motorola, Inc.)
While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry.
248 pages, Illustrations
Media | Books Hardcover Book (Book with hard spine and cover) |
Released | April 6, 1999 |
ISBN13 | 9780471181729 |
Publishers | John Wiley & Sons Inc |
Pages | 248 |
Dimensions | 237 × 163 × 19 mm · 516 g |
Language | English |