Ion-Solid Interactions: Fundamentals and Applications - Cambridge Solid State Science Series - Nastasi, Michael (Los Alamos National Laboratory) - Books - Cambridge University Press - 9780521616065 - December 2, 2004
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Ion-Solid Interactions: Fundamentals and Applications - Cambridge Solid State Science Series

Nastasi, Michael (Los Alamos National Laboratory)

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Ion-Solid Interactions: Fundamentals and Applications - Cambridge Solid State Science Series

This book describes how materials, from semiconductors to tool steels, can be modified to create new materials. Its importance is that it is the first book in two decades to describe completely the implantation process which is used universally in semiconductor production.


572 pages, 213 b/w illus. 45 tables

Media Books     Paperback Book   (Book with soft cover and glued back)
Released December 2, 2004
ISBN13 9780521616065
Publishers Cambridge University Press
Pages 572
Dimensions 164 × 232 × 35 mm   ·   880 g
Language English  
Series Editor Clarke, D. R.
Series Editor Suresh, S.
Series Editor Ward, I. M.