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Ion-Solid Interactions: Fundamentals and Applications - Cambridge Solid State Science Series
Nastasi, Michael (Los Alamos National Laboratory)
Ion-Solid Interactions: Fundamentals and Applications - Cambridge Solid State Science Series
Nastasi, Michael (Los Alamos National Laboratory)
This book describes how materials, from semiconductors to tool steels, can be modified to create new materials. Its importance is that it is the first book in two decades to describe completely the implantation process which is used universally in semiconductor production.
572 pages, 213 b/w illus. 45 tables
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | December 2, 2004 |
| ISBN13 | 9780521616065 |
| Publishers | Cambridge University Press |
| Pages | 572 |
| Dimensions | 164 × 232 × 35 mm · 880 g |
| Language | English |
| Series Editor | Clarke, D. R. |
| Series Editor | Suresh, S. |
| Series Editor | Ward, I. M. |
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