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Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies Badih El-Kareh Softcover reprint of hardcover 1st ed. 2009 edition
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Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies
Badih El-Kareh
Compiled from industrial and academic lecture notes and reflecting years of experience in the development of silicon devices, this book covers both their theoretical and practical aspects, and how their electrical properties and processing conditions interact.
598 pages, 17 black & white tables, biography
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | October 29, 2010 |
| ISBN13 | 9781441942241 |
| Publishers | Springer-Verlag New York Inc. |
| Pages | 598 |
| Dimensions | 155 × 235 × 31 mm · 861 g |
| Language | English |
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