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Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing - Springer Series in Advanced Manufacturing Wei Gao 2010 edition
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Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing - Springer Series in Advanced Manufacturing
Wei Gao
Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items.
367 pages, 3 black & white tables, biography
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | June 28, 2010 |
| ISBN13 | 9781849962537 |
| Publishers | Springer London Ltd |
| Pages | 354 |
| Dimensions | 241 × 165 × 28 mm · 635 g |
| Language | English |
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