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MEMS Field Models and Optimal Design 1st ed. 2020 edition
Paolo Di Barba
MEMS Field Models and Optimal Design 1st ed. 2020 edition
Paolo Di Barba
This book highlights numerical models as powerful tools for the optimal design of Micro-Electro-Mechanical Systems (MEMS). However, design optimization should also take into account fine-sizing effects on device behavior and therefore be based on distributed-parameter models, such as finite-element models.
190 pages, IX, 190 p.
Media | Books Book |
Released | June 27, 2019 |
ISBN13 | 9783030214951 |
Publishers | Springer Nature Switzerland AG |
Pages | 190 |
Dimensions | 471 g |
Language | German |
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