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MEMS Field Models and Optimal Design Paolo Di Barba 1st ed. 2020 edition
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MEMS Field Models and Optimal Design
Paolo Di Barba
This book highlights numerical models as powerful tools for the optimal design of Micro-Electro-Mechanical Systems (MEMS). However, design optimization should also take into account fine-sizing effects on device behavior and therefore be based on distributed-parameter models, such as finite-element models.
190 pages, IX, 190 p.
| Media | Books Book |
| Released | June 27, 2019 |
| ISBN13 | 9783030214951 |
| Publishers | Springer Nature Switzerland AG |
| Pages | 190 |
| Dimensions | 150 × 220 × 20 mm · 462 g |
| Language | German |
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