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MEMS: Field Models and Optimal Design - Lecture Notes in Electrical Engineering 2020 edition
Paolo Di Barba
MEMS: Field Models and Optimal Design - Lecture Notes in Electrical Engineering 2020 edition
Paolo Di Barba
This book highlights numerical models as powerful tools for the optimal design of Micro-Electro-Mechanical Systems (MEMS). However, design optimization should also take into account fine-sizing effects on device behavior and therefore be based on distributed-parameter models, such as finite-element models.
190 pages, IX, 190 p.
Media | Books Paperback Book (Book with soft cover and glued back) |
Released | August 14, 2020 |
ISBN13 | 9783030214982 |
Publishers | Springer Nature Switzerland AG |
Pages | 190 |
Dimensions | 454 g |
Language | French |
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