Toward Inertial-Navigation-on-Chip: The Physics and Performance Scaling of Multi-Degree-of-Freedom Resonant MEMS Gyroscopes - Springer Theses - Haoran Wen - Books - Springer Nature Switzerland AG - 9783030254698 - September 25, 2019
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Haoran Wen
Toward Inertial-Navigation-on-Chip: The Physics and Performance Scaling of Multi-Degree-of-Freedom Resonant MEMS Gyroscopes - Springer Theses 2019 edition

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This thesis develops next-generation multi-degree-of-freedom gyroscopes and inertial measurement units (IMU) using micro-electromechanical-systems (MEMS) technology. It covers both a comprehensive study of the physics of resonator gyroscopes and novel micro/nano-fabrication solutions to key performance limits in MEMS resonator gyroscopes.

127 pages, 92 Tables, color; 83 Illustrations, color; 9 Illustrations, black and white; XIII, 127 p.

Media Books     Hardcover Book   (Book with hard spine and cover)
Released September 25, 2019
ISBN13 9783030254698
Publishers Springer Nature Switzerland AG
Pages 127
Dimensions 150 × 220 × 20 mm   ·   454 g
Language German  

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