Process Variations in Microsystems Manufacturing - Microsystems and Nanosystems - Michael Huff - Books - Springer Nature Switzerland AG - 9783030405588 - April 10, 2020
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Process Variations in Microsystems Manufacturing - Microsystems and Nanosystems 2020 edition

Michael Huff

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Process Variations in Microsystems Manufacturing - Microsystems and Nanosystems 2020 edition

This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps.

521 pages, 24 Illustrations, color; 212 Illustrations, black and white; XIX, 521 p. 236 illus., 24 i

Media Books     Hardcover Book   (Book with hard spine and cover)
Released April 10, 2020
ISBN13 9783030405588
Publishers Springer Nature Switzerland AG
Pages 521
Dimensions 934 g
Language German  
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