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Plasmaunterstutzte Abscheidung und Charakterisierung von Siliziumnitridfilmen
Stefan Zaengler
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Plasmaunterstutzte Abscheidung und Charakterisierung von Siliziumnitridfilmen
Stefan Zaengler
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | June 9, 2021 |
| ISBN13 | 9783346377319 |
| Publishers | Grin Verlag |
| Pages | 56 |
| Dimensions | 148 × 210 × 3 mm · 96 g |
| Language | German |
See all of Stefan Zaengler ( e.g. Paperback Book )