CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications - Microtechnology and MEMS - D. Lange - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783642077289 - December 4, 2010
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D. Lange
CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications - Microtechnology and MEMS Softcover reprint of the original 1st ed. 2002 edition

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This book is intended for scientists and engineers in the field of micro- and nano electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype.

150 pages, biography

Media Books     Paperback Book   (Book with soft cover and glued back)
Released December 4, 2010
ISBN13 9783642077289
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 142
Dimensions 155 × 235 × 8 mm   ·   222 g
Language English  

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