Ultraclean Surface Processing of Silicon Wafers: Secrets of VLSI Manufacturing - Takeshi Hattori - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783642082726 - December 7, 2010
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Ultraclean Surface Processing of Silicon Wafers: Secrets of VLSI Manufacturing Softcover reprint of hardcover 1st ed. 1998 edition

Takeshi Hattori

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Ultraclean Surface Processing of Silicon Wafers: Secrets of VLSI Manufacturing Softcover reprint of hardcover 1st ed. 1998 edition

This book thus opens the door to the manufacturing of reliable nanoscale devices and will be extremely useful for every engineer, physicist and technician involved in the production of silicon semiconductor devices.


648 pages, 345 black & white illustrations, biography

Media Books     Paperback Book   (Book with soft cover and glued back)
Released December 7, 2010
ISBN13 9783642082726
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 616
Dimensions 155 × 235 × 36 mm   ·   934 g
Language German  
Translator Hattori, T.
Translator Heusler, S.
Translator Webb, J.P.