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Design and Manufacturing of Active Microsystems - Microtechnology and MEMS 2011 edition
Stephanus Buttgenbach
Design and Manufacturing of Active Microsystems - Microtechnology and MEMS 2011 edition
Stephanus Buttgenbach
This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle.
456 pages, 319 black & white illustrations, 33 colour illustrations
Media | Books Hardcover Book (Book with hard spine and cover) |
Released | March 10, 2011 |
ISBN13 | 9783642129025 |
Publishers | Springer-Verlag Berlin and Heidelberg Gm |
Pages | 444 |
Dimensions | 155 × 235 × 30 mm · 748 g |
Language | French |
Editor | Burisch, Arne |
Editor | Buttgenbach, Stephanus |
Editor | Hesselbach, Jurgen |
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