Modeling and Feedback Control of Mems Devices

Micro-electromechanical systems (MEMS) are micromachines that allow computation, sensing, mobility, and manipulation at small scales down to the size of microns. During the past decade, MEMS technology has allowed the development of many advanced devices that have found their way to the market. Ever increasing needs for MEMS are fueled by the exponential growth of markets such as cell phones, gaming, and communications and military applications. Both quality and price requirements put stringent specifications on the new MEMS devices. Feedback control techniques facilitate reliably meeting these specifications. This book provides the reader with control strategies and design techniques in a collection of practical examples, covering topics such as dynamical modeling of MEMS devices, dynamic control for performance improvement, and improved MEMS design based on control system analysis.